Russia's Zelenograd Nanotechnology Center (ZNTC) has completed the third development stage of a lithography machine for 200 mm wafers, but this prototype is still in technical testing and not yet ready for mass chip production. The project received about US$70 million from Russia's Ministry of Industry and Trade, with supply contracts planned from 2027 and commercial wafer processing possible around 2029 at the earliest. The system uses a 193 nm excimer laser for 130 nm technology, roughly 25 years behind ASML's PAS 5500/800, which was commercialized in 2001. Belarus' Planar plays a key role, making it a Russia-Belarus collaboration, and mature-node chips still serve automotive, industrial and power uses, with domestic demand estimated at 15-25 machines for 2030-2032.
Summary written by Upside AI from the original article. Read the source for full details.
Original headline: Nga hoàn thành nguyên mẫu máy quang khắc 130 nm đầu tiên: Công nghệ 25 năm tuổi vẫn có giá trị
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